3-Zone 1400°C CVD Tube Furnace With Gas Mixing & Pumping System 100mm OD

TF1400 Series Chemical Vapor Deposition (CVD) Tube Furnaces

The TF1400 series CVD tube furnaces are designed for advanced thermal processes, featuring Mitsubishi (Japan) high-quality alumina fiber insulation and SiC (silicon carbide) heating elements for enhanced heat resistance and efficiency. With its dual-wall steel housing, this furnace minimizes heat loss to improve energy efficiency, making it ideal for demanding CVD applications.

Key Features:

• High-Quality Insulation: Mitsubishi 1600-grade fiber alumina ensures exceptional heat retention and stability during operation.
• Robust Heating Elements: Silicon carbide (SiC) heating elements provide superior thermal performance, allowing for higher temperatures and efficient heat distribution.
• Advanced Temperature Control: Eurotherm (UK) digital controllers, with communication ports, offer remote control and monitoring via PC. The controller can be configured for 8 or 50 segments for precise ramping and dwelling profiles.
• Dual Vacuum Seals: Dual flanges enhance sealing and extend tube life, ensuring a reliable vacuum environment.
• Multiple Atmosphere Processing: Enables complex processes such as binder burnout in air and parts sintering under inert gas or rough vacuum conditions.
• Precision Monitoring: Built-in ammeter and dual voltmeters simplify troubleshooting and monitoring. Additionally, a long-life Type S thermocouple provides accurate temperature measurement.

Safety Features:

• Overheat Protection: Automatically shuts down the furnace if the temperature goes beyond the set limit or if the thermocouple malfunctions.
• Power Failure Protection: Furnace resumes operation from the point of failure when power is restored.
• Warning: Do not use explosive gases such as Hydrogen, Methane, or Carbon Monoxide.

Technical Specifications:

• Tube Material: High purity (99%) Al₂O₃ alumina.
• Temperature Range: Ambient to 1400°C (2552°F) max, with a constant working temperature of 1300°C (2372°F).
• Refractory Lining: Mitsubishi (Japan) 1600-grade fiber alumina for high thermal stability.
• Heating Element: Silicon carbide (SiC).
• Thermocouple Type: Type S.
• Max Heating Rate: 10°C/min below 1200°C; 5°C/min above 1200°C.
• Temperature Controller Precision: ±1°C (±1.8°F).
• Electrical Requirements: 208-240VAC, single-phase, 50/60 Hz.

Standard Package Includes:

• Stainless steel vacuum sealing flanges with a mechanical vacuum gauge, two valves, and four thermal ceramic blocks.

The vacuum pump mobile cart is available only with the purchase of a pump and a digital vacuum controller.

Ideal For:

This furnace is an excellent choice for industries requiring high-performance CVD applications, offering superior control over temperature and atmosphere with enhanced safety and efficiency.

The TF1400 series furnace provides reliability and precision for a wide range of high-temperature processing needs.